Trimethyl Phosphate (TMPO)
High-purity phosphorus ester for PSG and BPSG deposition.
Enables precise dielectric layering in wafer fabrication and microelectronics production.
Consistent Phosphorus Doping for Dielectric Glass in Microelectronics
Trimethyl Phosphate (TMPO) is a high-purity phosphorus ester widely used as a dopant precursor in the formation of phospho-silicate glass (PSG) and boro-phospho-silicate glass (BPSG) dielectric layers. These layers are applied during wafer fabrication through chemical vapor deposition (CVD) to enhance isolation, planarization, and stress control in semiconductor devices.
With excellent volatility and thermal behavior, TMPO is suitable for both front-end and back-end semiconductor processes, including the production of integrated circuits, MEMS, and discrete components.
NAGASE supplies electronic-grade TMPO globally to support advanced semiconductor manufacturing, providing both logistics and technical expertise.
Molecular formula: PO(OCH3)3
Relative molecular mass: 140.08
Chemical & Physical Properties:
Colorless liquid, fruit flavor,
Melting point: -46 C
Boiling point: 197 °C
Density :1.20 g / ml.
Flammable, soluble in water and ether, insoluble in ethanol.
Applications
Trimethyl Phosphate is mainly used for PSG and BPSG deposition in semiconductor wafer processing.
- Deposition of PSG and BPSG layers
- Wafer fabrication workflows in IC and chip production
- Semiconductor manufacturing for doped dielectric films
- Processing of discrete components
- Fabrication of MEMS devices and microstructures
Features
Trimethyl Phosphate offers high purity, consistent thermal behavior, and excellent compatibility with CVD processes in advanced microelectronics manufacturing.
- Electronic-grade formulation – Suitable for critical PSG and BPSG applications
- Low metal impurities to ensure clean dielectric deposition
- Excellent volatility – Supports uniform vapor-phase delivery
- Thermal stability for reliable behavior in high-temperature processes
- Global availability – Supplied by NAGASE with full technical support
Product Specification
|
Analysis Project |
Technical indicators |
|
Purity, min |
99.9999995%（8.5N） |
|
Chloride, max |
50 ppb |
|
Moisture, max |
20 ppm |
|
Number of particles ≥ 0.3 µm,max |
7 p/ml |
|
Number of particles ≥ 0.5 µm,max |
5 p/ml |
|
Main content, min |
99.99% |
|
Chroma, max |
5APHA |
Packaging Size
Container: Stainless steel bottle
Packing: Stainless steel locker
Specification: 5 gallons (19 L)
