Triethyl Borate (TEB) for Organic Synthesis and Catalysis

High-purity boron ester for advanced chemical applications.
Nagase supplies triethyl borate (TEB) used in organic synthesis, cross-coupling reactions, and specialty solvent systems where boron precision is essential.

High-Purity Boron Source for BPSG and Specialty Chemical Applications

Triethyl borate (TEB) is a high-purity boron ester used as a reagent and solvent in advanced organic synthesis and boron-based coupling reactions. Its favorable volatility, low viscosity, and clean decomposition make it ideal for precision chemistry, particularly in the production of pharmaceuticals, agrochemicals, and specialty materials.

Nagase supplies triethyl borate (TEB) in high-purity grades, supporting custom boron chemistry and demanding synthesis environments with reliable quality and application expertise.

Chemical Formula: B(OC2H5)3

Molecular Weight: 145.99

Physical & Chemical Properties

A clear and colorless liquid with mild odor and remarkable thermal stability.

Density: 0.86 Kg/L
Melting Point: -84.8°C
Boiling Point: 118°C

It has good hygroscopicity and can be decomposed into Ethanol and Boric Acid in water. Flammable.

Applications

Triethyl borate (TEB) is primarily used in advanced wafer fabrication and boron-based thin-film processes.

  • Boro-phospho-silicate glass (BPSG) deposition in semiconductor manufacturing
  • Wafer-level processing in integrated circuit (IC) and discrete device production
  • MEMS fabrication requiring precise boron doping and thin-film formation
  • Electronic-grade boron chemistry for high-purity material synthesis

Features

Triethyl borate (TEB) combines high boron purity with excellent processing behavior for semiconductor and chemical synthesis applications.

  • High boron purity for deposition and doping processes in electronics manufacturing
  • Clean decomposition and low residue profile in thin-film applications
  • High volatility and thermal stability for precise vapor-phase processing
  • Compatible with BPSG deposition and boron-based precursor systems
  • Available in electronic-grade quality with controlled moisture and impurity levels

Product Specification

Product 8.5N
Purity (based on metals analyzed), min 99.9999995 %
(Al)max 0.2 ppb (Ni)max 0.2 ppb
(Ag)max 0.05 ppb (Pb)max 0.1 ppb
(As)max 0.1 ppb (Pd)max 0.05 ppb
(Au)max 0.05 ppb (Pt)max 0.05 ppb
(Ba)max 0.1 ppb (Rb)max 0.05 ppb
(Be)max 0.05 ppb (Re)max 0.05 ppb
(Bi)max 0.05 ppb (Rh)max 0.05 ppb
(Ca)max 0.8 ppb (Sb)max 0.05 ppb
(Cd)max 0.05 ppb (Sn)max 0.05 ppb
(Ce)max 0.05 ppb (Sr)max 0.05 ppb
(Co)max 0.05 ppb (Ta)max 0.05 ppb
(Cu)max 0.1 ppb (Th)max 0.05 ppb
(Cr)max 0.1 ppb (Ti)max 0.05 ppb
(Fe)max 0.3 ppb (Tl)max 0.05 ppb
(Ga)max 0.05 ppb (U )max 0.05 ppb
(Ge)max 0.05 ppb (V )max 0.05 ppb
(Hf)max 0.05 ppb (W )max 0.05 ppb
(Hg)max 0.1 ppb (Zn)max 0.05 ppb
(In)max 0.05 ppb (Zr)max 0.05 ppb
(Ir)max 0.05 ppb Cl- max 50ppb
( K)max 0.2 ppb Water max 20ppm
(Li)max 0.05 ppb Particle ≥0.2 µm max 10 p/ml
(Mg)max 0.2 ppb Particle ≥0.3 µm max 7 p/ml
(Mn)max 0.1 ppb Particle ≥ 0.5µm max 5 p/ml
(Mo)max 0.05 ppb Particle ≥ 1.0µm max 1 p/ml
(Na)max 0.5 ppb Assay min 99.99%
(Nb)max 0.05 ppb Chroma max 5APHA

Packaging Size

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill Volume: 2 gallons,5 gallons (19 L),10 gallons.

Frequently Asked Questions about Triethyl Borate (TEB)

What is triethyl borate (TEB) used for?
TEB is primarily used as a boron source in the formation of boro-phospho-silicate glass (BPSG) layers in semiconductor manufacturing. It is also applied in organic synthesis and as a specialty solvent.

Why is TEB important in wafer fabrication?
Its high purity and clean decomposition make it ideal for boron-based deposition processes, enabling uniform thin films with minimal contamination—critical in IC and MEMS production.

Is triethyl borate compatible with vapor-phase processing?
Yes, due to its high volatility and thermal stability, TEB performs reliably in CVD and other vapor-phase applications requiring precise control.

What quality grades are available for TEB?
Nagase offers triethyl borate in high-purity electronic-grade quality with low moisture and impurity levels, tailored to meet advanced manufacturing requirements.

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Electronics

Enes Islemecioglu
Sales Manager