You are here: Electronics > Triethyl Borate (TEB)

Triethyl Borate (TEB)

Chemical Formula: B(OC2H5)3

Molecular Weight: 145.99

Physical & Chemical Properties

A clear and colorless liquid with mild odor and remarkable thermal stability.

Density: 0.86 Kg/L

Melting Point: -84.8°C

Boiling Point: 118°C

It has good hygroscopicity and can be decomposed into Ethanol and Boric Acid in water. Flammable.

Applications

Mainly used to form Boro-phospho-silicate Glass (BPSG) layers through deposition process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product 8.5N
Purity (based on metals analyzed), min 99.9999995 %
(Al)max 0.2 ppb (Ni)max 0.2 ppb
(Ag)max 0.05 ppb (Pb)max 0.1 ppb
(As)max 0.1 ppb (Pd)max 0.05 ppb
(Au)max 0.05 ppb (Pt)max 0.05 ppb
(Ba)max 0.1 ppb (Rb)max 0.05 ppb
(Be)max 0.05 ppb (Re)max 0.05 ppb
(Bi)max 0.05 ppb (Rh)max 0.05 ppb
(Ca)max 0.8 ppb (Sb)max 0.05 ppb
(Cd)max 0.05 ppb (Sn)max 0.05 ppb
(Ce)max 0.05 ppb (Sr)max 0.05 ppb
(Co)max 0.05 ppb (Ta)max 0.05 ppb
(Cu)max 0.1 ppb (Th)max 0.05 ppb
(Cr)max 0.1 ppb (Ti)max 0.05 ppb
(Fe)max 0.3 ppb (Tl)max 0.05 ppb
(Ga)max 0.05 ppb (U )max 0.05 ppb
(Ge)max 0.05 ppb (V )max 0.05 ppb
(Hf)max 0.05 ppb (W )max 0.05 ppb
(Hg)max 0.1 ppb (Zn)max 0.05 ppb
(In)max 0.05 ppb (Zr)max 0.05 ppb
(Ir)max 0.05 ppb Cl- max 50ppb
( K)max 0.2 ppb Water max 20ppm
(Li)max 0.05 ppb Particle ≥0.2 µm max 10 p/ml
(Mg)max 0.2 ppb Particle ≥0.3 µm max 7 p/ml
(Mn)max 0.1 ppb Particle ≥ 0.5µm max 5 p/ml
(Mo)max 0.05 ppb Particle ≥ 1.0µm max 1 p/ml
(Na)max 0.5 ppb Assay min 99.99%
(Nb)max 0.05 ppb Chroma max 5APHA

Shelf Life: 24 months

Packaging Size

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill Volume: 2 gallons,5 gallons (19 L),10 gallons.

 

Electronics

Enes Islemecioglu

Sales Manager