Trimethyl Phosphite (TMP)

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Trimethyl Phosphite (TMP)

Chemical Formula: P(OCH₃)₃

Molecular Weight: 124.08

Physical & Chemical Properties

A colorless liquid with pungent odor.

Melting Point: -78 ℃

Boiling Point: 111 to 112 ℃

Density: 1.05 g/mL

Flammable. Insoluble in water. Slowly hydrolyzed into Phosphoric Acid and Methanol when it contacts with water.

Applications

A phosphorus source used to form Phospho-silicate Glass (PSG) and Boro-phospho-silicate Glass (BPSG) layers through deposition process in wafer fabrication. An important electronic chemical needed for the manufacturing of semiconductor, discrete devices and MEMS products.

Product Specification

Product		8.5N
Purity (based on metals analyzed), min		99.9999995%
（Al）max	0.7 ppb	（Pt）max	0.05 ppb
（Sb）max	0.05 ppb	（K）max	0.3 ppb
（As）max	0.5 ppb	（Re）max	0.05 ppb
（Ba）max	0.05 ppb	（Rh）max	0.05 ppb
（Be）max	0.1 ppb	（Rb）max	0.05 ppb
（Bi）max	0.05 ppb	（Ag）max	0.3 ppb
（Cd）max	0.1ppb	（Na) max	1 ppb
（Ca）max	1 ppb	（Sr）max	0.05 ppb
（Ce）max	0.05 ppb	（Ta）max	0.05 ppb
（Cr）max	0.1 ppb	（Tl）max	0.05 ppb
（Co）max	0.1 ppb	（Th）max	0.1 ppb
（Cu）max	0.5 ppb	（Sn）max	0.5 ppb
（Ga）max	0.05ppb	（Ti）max	0.3 ppb
（Ge）max	0.05 ppb	（W ）max	0.05 ppb
（Au）max	0.1 ppb	（U ）max	0.1 ppb
（Hf）max	0.2 ppb	（V ）max	0.05 ppb
（In）max	0.05 ppb	（Zn）max	0.5 ppb
（Ir）max	0.05 ppb	（Zr）max	0.1 ppb
（Fe）max	0.5 ppb	（B ）max	50 ppb
（Pb）max	0.5 ppb	Cl-max	50 ppb
（Li）max	0.1 ppb	Water max	25 ppm
（Mg）max	0.2 ppb	Particles ≥0.µm max	10 p/ml
（Mn）max	0.1 ppb	Particles ≥0.3 µm max	7 p/ml
（Hg）max	0.2 ppb	Particles ≥0.5 µm max	5 p/ml
（Mo）max	0.1 ppb	Particles ≥1.0 µm max	1 p/ml
（Ni）max	0.5 ppb	Chroma max	5APHA
（Nb）max	0.05 ppb	Assay min	99.99 %
（Pd）max	0.05 ppb	Shelf life	12 months

Packaging Size

Container: Stainless Steel Cylinder

Packaging: Stainless Steel Cabinet

Fill volume: 2 gallons, 5 gallons (19 L),10 gallons.

Electronics

Enes Islemecioglu
Sales Manager

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